Applied Physics Letters · 1981 · 26 citations · 6 references
EngineeringMaterials EngineeringMaterials SciencePhotonicsSemiconductor MaterialsSurface ScienceLaser PhysicsLaser Surface ProcessingSemiconductor SurfacesSilicon MaterialsSurface PhysicsUltrafast OpticsAmorphous StructureLaser Surface CleaningLaser Surface PatterningSilicon Surface ScienceUltrafast Laser Material Processing
A 10-nsec pulsed ruby laser was used to prepare atomically clean silicon surfaces in UHV. With picosecond Nd:YAG laser pulses at 532 amd 266 nm, the amorphous patterns formed on the atomically clean silicon surfaces in UHV were compared with those formed in air and other ambient conditions. Results show that the picosecond laser-induced phase transition of silicon does not depend on the ambient conditions or on the native surface oxide layer of silicon.
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Picosecond laser-induced melting and resolidification morphology on Si
P. L. Liu, R. Yen, N. Bloembergen et al. · Applied Physics Letters · 1979 · 325 citations
Natural Sciences, Materials Engineering, Materials Science +17
Cleaning of Silicon Surfaces by Heating in High Vacuum
F. G. Allen, Joseph Eisinger, H. D. Hagstrum et al. · Journal of Applied Physics · 1959 · 96 citations
Natural Sciences, Materials Engineering, Materials Science +17