Concepedia

Effect of substrate misorientation on tear-drop-like hillock defect densities in InP and GaInAsP grown by metalorganic chemical vapor deposition

M. Nakamura, S. Katsura, Nobuo Makino, Eiji Ikeda, Katsuyuki Suga, R. Hirano

Journal of Crystal Growth · 1993 · 16 citations · 2 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor DevicesChemical Vapor DepositionCrystal GrowthDefectsDefects In Electronic MaterialsSemiconductor Crystal GrowthSemiconductor DefectsCrystal Defects During GrowthDefect ProductionEpitaxial DefectsEpitaxial Growth Of Wide-bandgap SemiconductorsMetalorganic Chemical Vapor DepositionSurface Defect FormationThin-film Growth Mechanisms

References

2

Surface Dislocation Theory of Reconstructed Crystals: VPE GaAs

D. L. Rode · physica status solidi (a) · 1975 · 41 citations

Natural Sciences, Materials Science, Crystal Structure +16

Critical misorientation morphology in AlGaAs and GaAs grown by atmospheric-pressure MOCVD on misoriented substrates

Eric S. Johnson, G. E. Legg · Journal of Crystal Growth · 1988 · 14 citations

Engineering, Materials Engineering, Materials Science +14