Nitride based Power Chip with Indium-Tin-Oxide p-Contact and Al Back-Side Reflector

Abstract

Nitride-based large size (i.e. 1 mm×1 mm) indium-tin-oxide (ITO) light emitting diodes (LEDs) were successfully fabricated. In order to enhance the output intensity of power chips, Al reflector was deposited by e-beam evaporator on the chip backside. It was found that the 350 mA output power was 84.8 mW (W-P-E=7.2%) at 460 nm for the power chip with ITO as p-contacts and Al as back-side reflector. It was also found that ITO power chip with Al reflector was more reliable.