Nitridation of SiO2 thin films at low ammonia pressures: Composition and electrical properties - Concepedia

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Nitridation of SiO2 thin films at low ammonia pressures: Composition and electrical properties

15

Citations

37

References

1990

Year

B. Balland, A. Glachant, J.C. Bureau, C. Plossu

Thin Solid Films

Materials ScienceEngineeringLow Ammonia PressuresOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsSilicon On InsulatorElectrical PropertiesChemical Vapor DepositionThin Film ProcessingSio2 Thin Films

References

	Year	Citations

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