Small oxide‐free vertical‐cavity surface‐emitting lasers with high efficiency and high power

Abstract

Data are presented showing high external differential quantum efficiency (DQE) and record‐high output power in vertical‐cavity surface‐emitting lasers (VCSELs) with diameters below 3 µm. Good uniformity and reproducibility are achieved in devices with very small sizes. Over 75% DQEs are measured with maximum output powers of 5, 7.3, 8, 8.7 and 11.6 mW for 1, 1.5, 2, 2.5 and 3 µm diameter VCSELs, respectively.