Concepedia

Publication | Open Access

Stress controlled pulsed direct current co-sputtered Al<sub>1−x</sub>Sc<sub>x</sub>N as piezoelectric phase for micromechanical sensor applications

DOIFull Paper Access

85

Citations

24

References

2015

Year

Simon Fichtner, Tim Reimer, Steffen Chemnitz, Fabian Lofink, Bernhard Wagner
APL Materials

Abstract

Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric

References

YearCitations

Page 1