Fast Response <scp> <scp>NO</scp> </scp> ₂ Gas Sensor Based on <scp> <scp>In</scp> </scp> ₂ <scp> <scp>O</scp> </scp> ₃ Nanoparticles

Abstract

In this research, hydrothermal‐calcination route was applied to synthesize In 2 O 3 nanoparticles for gas sensor application. Hydrothermal synthesis with duration of 5 h at 180°C resulted in In( OH ) 3 nanorods. Then, in the calcination step, considering controlled rate of heating and temperature, In 2 O 3 nanoparticles with rough surfaces were obtained. In the next step, these nanoparticles were deposited by low frequency AC electrophoretic deposition between the interdigitated electrodes to fabricate gas sensor. Deposition in the frequency of 10 kHz resulted in the chained nanoparticles in the interelectrode space. At the end, gas sensitivity measurements were conducted at 150°C–300°C and revealed that fabricated sensor had fast response and recovery times to NO 2 gas.