Fabrication of Ferroelectric BaTiO₃ Films by Electrophoretic Deposition

Abstract

BaTiO 3 thick films on Pt substrates were fabricated by the electrophoretic deposition method. The suspension was prepared with fine powder (0.1 µm in diameter) of BaTiO 3 , acetone and iodine. Dense and strong films were formed in an applied DC field of 500 V/cm. The films sintered at 1200°C were crystallized into the tetragonal phase at room temperature. The coercive field E c and the remanent polarization P r were estimated to be 1.6 kV/cm and 2.1 µC/cm 2 , respectively, from the P-E hysteresis loop observation.