Self-Assembled PbTiO₃Nano-Islands Prepared on SrTiO₃by Metalorganic Chemical Vapor Deposition

Abstract

PbTiO3 nano-islands were prepared on Pt(111)/SiO2/Si(100), Pt(111)/SrTiO3(111) and Pt(110)/SrTiO3(110) substrates by metalorganic chemical vapor deposition (MOCVD). When PbTiO3 was deposited on Pt(111)/SiO2/Si, PbTiO3 nano-islands on different Pt grains had different in-plane orientations. On the other hand, all PbTiO3 nano-islands on Pt(111)/SrTiO3(111) showed the same in-plane orientation. The size of PbTiO3 nano-islands on the Pt(111)/SrTiO3(111) substrate was uniform compared with that on the Pt(111)/SiO2/Si(100) substrate. When PbTiO3 islands were deposited on a Pt(110)/SrTiO3(110) substrate, triangular-prism-shaped PbTiO3 islands, which preferentially grew along the <010 > direction, were obtained. These PbTiO3 nano-islands had also uniform in-plane orientation. These results showed that the size, shape and in-plane orientation of self-assembled ferroelectric nano-islands by MOCVD were fairly controllable using the epitaxial relation.