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HfO2–SiO2 interface in PVD coatings
64
Citations
8
References
2001
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringElectronic MaterialsMaterial PropertySurface ScienceMaterials CharacterizationHfo2–sio2 InterfaceMaterial InnovationSurface EngineeringVacuum ScienceMaterial PerformanceVacuum DevicePvd CoatingsFunctional MaterialsChemical Vapor DepositionSilicon On Insulator
Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation V. Cosnier, M. Olivier, G. Théret, B. André; HfO2–SiO2 interface in PVD coatings. J. Vac. Sci. Technol. A 1 September 2001; 19 (5): 2267–2271. https://doi.org/10.1116/1.1382879 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
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