Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication

Block Copolymer Thermodynamics: Theory and Experiment

Frank S. Bates, Glenn H. Fredrickson · Annual Review of Physical Chemistry · 1990 · 3.8K citations

Macromolecular Chemistry, Engineering, Ab Block Copolymers +17

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.2K citations

Engineering, Electron-beam Lithography, Microscopy +18

Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates

Thomas Thurn‐Albrecht, J. Schotter, G. Kästle et al. · Science · 2000 · 2.1K citations

Materials Science, Copolymer Approach, Engineering +14

Block Copolymer Lithography: Periodic Arrays of ~10 ¹¹ Holes in 1 Square Centimeter

Miri Park, Christopher Harrison, P. M. Chaikin et al. · Science · 1997 · 1.8K citations

Spontaneous Self-assembly, Engineering, Electron-beam Lithography +25

Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates

Sang Ouk Kim, Harun H. Solak, Mark P. Stoykovich et al. · Nature · 2003 · 1.6K citations

Materials Science, Block Co-polymers, Engineering +12