Routes to 3D conformal solid-state dielectric polymers: electrodeposition versus initiated chemical vapor deposition

Abstract

We show that two distinct methods, electropolymerization and initiated chemical vapour deposition (<italic>i</italic>CVD), can be adapted to generate ultrathin polymers (30–50 nm thick) at three dimensionally (3D) porous conductive substrates comprising ∼300 μm-thick carbon-coated silica fiber paper (C@SiO₂).