Concepedia

Change in the Composition of Residual Gases in a Vacuum Chamber during Ti Film Deposition

S. N. Kravchenko

Instruments and Experimental Techniques · 2002 · 27 citations · 1 references

DOI

References

1

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

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