Realization of LTCC-Multilayer with Special Cavity Applications

Abstract

The Low Temperature Cofiring Ceramic Multilayer (LTCC-ML)-Technology, has got many possibilities for three-dimensionally shaped ceramic elements and devices. It enables new ways in the integration of electronical, mechanical and other functions in one module. An interesting field is the realization of special cavities for sensors and other applications. Cavities at the outside and cavities inside of a multilayer were discerned. The finish quality of such multilayer depends on the type of LTCC material, the kind of lamination process and tools, the flow of the tape material during the lamination and the process parameters. The firing process is another important step. The paper will show some conceptions of design and technology and methods of characterication for such multifunctionally devices.