Study on the AlN/Si interface properties - Concepedia

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Study on the AlN/Si interface properties

20

Citations

10

References

2003

Year

Dongjuan Xi, Yi Zheng, P. Chen, Rongming Chu, Shuai Gu, Bo Shen, Rong Zhang

Optical Materials

Aluminium NitrideElectrical EngineeringEngineeringAln/si Interface PropertiesApplied PhysicsMicroelectronicsInterface StructureInterface Property

References

	Year	Citations

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