Publication | Open Access
Fatigue-free behavior of Bi3.25La0.75Ti3O12 thin films grown on several bottom eletrodes by the polymeric precursor method
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2004
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Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringBi3.25la0.75ti3o12 Thin FilmsFerroelectric ApplicationMicrowave FurnaceOxide ElectronicsMechanical EngineeringApplied PhysicsFatigue-free Bi3.25la0.75ti3o12Fatigue-free BehaviorHigh-performance MaterialThin FilmsPolymeric Precursor MethodBlt CapacitorsThin Film Processing
Fatigue-free Bi3.25La0.75Ti3O12 (BLT) thin films were grown on LaNiO3,RuO2, and La0.5Sr0.5CoO3 bottom electrodes in a microwave furnace at 700 °C for 10 min. The remanent polarization (Pr) and the drive voltage (Vc) were in the range of 11–23μC∕cm2 and 0.86–1.56 V, respectively, and are better than the values found in the literature. The BLT capacitors did not show any significant fatigue up to 1010read∕write switching cycles.
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