Fabrication and electrical properties of (111) textured (Ba0.6Sr0.4)TiO3 film on platinized Si substrate

Abstract

The authors report the fabrication of (Ba0.6Sr0.4)TiO3 (BST) film on Pt∕Si(001) substrate without Ti adhesion layer by magnetron sputtering. X-ray diffraction technique is used to characterize the orientation and phase purity of BST/Pt heterostructure. It is found that both BST and Pt films are (111) textured. The (111) BST films are observed to have high tunability of 49.4%; the dielectric constant and dielectric loss of the BST film are about 682 and 0.015, respectively. The leakage current density of BST film agrees well with the space-charge-limited current theory at room temperature and is only 3.90×10−8A∕cm2 at 455kV∕cm.