Schottky contacts on CF4/H2 reactive ion etched β-SiC - Concepedia

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Schottky contacts on CF4/H2 reactive ion etched β-SiC

11

Citations

9

References

1998

Year

G. Constantinidis, J Kuzmic, K. Michelakis, K. Tsagaraki

Solid-State Electronics

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsSemiconductor Device FabricationSchottky ContactsCarbide

References

	Year	Citations

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