Optimized growth of lattice-matched InxAl1−xN∕GaN heterostructures by molecular beam epitaxy

Abstract

The authors present a systematic study on the growth of the ternary compound InxAl1−xN by molecular beam epitaxy. This work concentrates on In mole fractions x around 0.17, as this composition is in-plane lattice matched to GaN. At a growth temperature of 540°C, high quality material was obtained using a total metal to nitrogen flux ratio of ∼1. Using these growth parameters, high quality GaN∕InAlN superlattices were obtained without growth interruptions.