E-Beam Recording of Domain Structures on the Nonpolar Surface of LiNbO₃Crystals at Different SEM Voltages and Their Investigation by PFM and SHG Microscopy

Abstract

The e-beam recording of planar domains on the Y-face of LiNbO3 crystal was performed with an e-beam of different energies. The combination of etching, AFM and confocal SHG microscopy provided more full characterization of the fabricated planar microdomain patterns. New data were obtained on the dependence of domain formation on the irradiation conditions. It is shown that the thickness of planar domains can be affected by varying e-beam energies.