Improvement of resistance switching characteristics in a thin FeOx transition layer of TiN/SiO2/FeOx/FePt structure by rapid annealing

Li-Wei Feng, Chun‐Yen Chang, Yao‐Feng Chang, Ting‐Chang Chang, Shin-Yuan Wang, Shih-Ching Chen, Chao-Cheng Lin, Shih-Cheng Chen, Pei-Wei Chiang

Applied Physics Letters · 2010 · 36 citations · 12 references

Concepts

Abstract

In this paper, the influence of a 600 °C rapid thermal annealing for 60 s on the improvements of resistance switching behaviors in a TiN/SiO2/FeOx/FePt structure is reported. It is found that besides the distinct reduction in memory switching parameters in forming voltage, set/reset voltages, and their dispersions, the resistance ratio of high-resistance state to low-resistance state is also enlarged after annealing. The effects of annealing on improving the resistance switching properties are discussed by x-ray diffraction and x-ray photon-emission spectra depth profile results. Additionally, good retention characteristics are exhibited in the annealed TiN/SiO2/FeOx/FePt resistance switching memory.

References

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