Publication | Closed Access
A 15 b electromechanical sigma-delta converter for acceleration measurements
85
Citations
3
References
2002
Year
Unknown Venue
EngineeringMeasurementAcceleration MeasurementsVibration MeasurementAccelerometerMicroelectromechanical SystemsEducationCapacitive AccelerometerPower ElectronicsTilt MeasurementPrecision NavigationSensor TechnologyMicro-electromechanical SystemPrecision AccelerometersKinesiologyVibrationsCalibrationInstrumentationAnalog-to-digital ConverterElectrical EngineeringInertial SensorsMechanical DesignMicropositioningSensorsAerospace EngineeringGyroscopeMechanical SystemsVibration Control
Precision accelerometers for applications such as inertial navigation and guidance, tilt measurement and low-level vibration monitoring can be characterized by shown specifications . Drawbacks of classical electromagnetic servo-accelerometers (fabrication cost, power consumption and shock resistance) are overcome by using a bulk micromachined capacitive accelerometer and a CMOS interface circuit.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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