2002 · 21 citations · 0 references
EngineeringManufacturing EngineeringSystems EngineeringAutomationManufacturing SystemsProduction ControlFactory AutomationManufacturing AutomationManufacturing System IntegrationMaterial HandlingMaterial Handling EquipmentShop Floor ControlAutomated Material HandlingAutomated Material Handling SystemsControl RequirementsMaterial DynamicsMaterial Handling AutomationMaterials Movement SystemsSystem Requirements SpecificationSystems Of Systems Integration
A detailed analysis of the needs and requirements for successfully designing and implementing automated material handling and control systems in wafer fabs is presented. In addition, potential system configurations and options for both interbay and intrabay material handling designs are discussed. The control system requirements, the importance of total systems integration, and the role of the skilled production operator are addressed. Constant references are made to material movement dynamics-a critical factor that affects the performance and acceptance of the system.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>