A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer

Abstract

Abstract In this article a monolithic resonant terahertz sensor element with a noise equivalent power superior to that of typical commercial room temperature single pixel terahertz detectors and capable of close to real time read‐out rates is presented. The detector is constructed via the integration of a metamaterial absorber and a micro‐bolometer sensor. An absorption magnitude of 57% at 2.5 THz, a minimum NEP of and a thermal time constant of 68 ms for the sensor are measured. As a demonstration of detector capability, it is employed in a practical Nipkow terahertz imaging system. The monolithic resonant terahertz detector is readily scaled to focal plane array formats by adding standard read‐out and addressing circuitry enabling compact, low‐cost terahertz imaging.