Parylene-pyrolyzed carbon for MEMS applications

Abstract

This paper presents Parylene-pyrolyzed carbon for MEMS applications. Carbons have been used as conductive materials with many promising chemical and thermal properties. This paper focuses on parylene-pyrolyzed carbon to take advantages of its smooth surface deposition and benzene-rich chemical structure. The description of the parylene-pyrolyzed carbon has been tried through evaluations of electrical and mechanical properties in terms of MEMS applications as well as general features. Young's modulus and the resistivity of parylene-pyrolyzed carbon (800/spl deg/C pyrolysis) becomes 70GPa and 0.1 /spl Omega/cm, respectively. The relationship between these properties and density will be also discussed.