A 2/3-inch 2M-pixel STACK-CCD imager

Abstract

Shrinking pixel size in conventional CCD imagers degrades device performance. Unsatisfactory smear noise of -90 dB is attained in a 2/3-inch 2M pixel CCD imager. The STACK-CCD imager has a great advantage regarding this problem. A 100% aperture ratio and low smear noise are maintained regardless of future pixel shrinking, because CCD scanning circuits are overlaid with an amorphous silicon (a-Si) photoconversion layer.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>