Publication | Closed Access
Interface broadening in sputter depth profiling through alternating layers of isotopically purified silicon
44
Citations
32
References
1990
Year
Interface BroadeningEngineeringPhysicsSurface AnalysisSurface ScienceApplied PhysicsSemiconductor Device FabricationIntegrated CircuitsSputter DepthMicroelectronicsSilicon On InsulatorThin Film ProcessingSilicon Debugging
| Year | Citations | |
|---|---|---|
Page 1
Page 1