Obtaining of films of tungsten trioxide (WO3) by resistive heating of a tungsten filament

Abstract

Thin film of tungsten oxide (WO3) has been studied extensively as an electrochromic material and has numerous applications in electrochromic devices, smart windows, gas sensors and optical windows. In order to explore the possibility of using it in electrochromic devices, thorough study the optical properties of the WO3 is an important step. The WO3 layers have been grown by hot-filament metal oxide deposition technique under atmospheric pressure and an oxygen atmosphere. By FTIR and Raman scattering studies we found that the films contain hydrates. We have observed that the thin films of WO3 can be satisfactorily grown by this technique.