Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition

Abstract

Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness of KNN film was 7.1μm and fully dense films were obtained. The dielectric constants ε3T∕ε0 of the as-deposited and annealed films at 1kHz were 116 and 545, respectively, which are higher than any previously reported values for lead-free piezoelectric thin/thick films, either without or with heat treatment. The ferroelectric properties were improved after annealing and the maximum values of Pr=8.1μC∕cm3 and Ec=100kV∕cm were achieved. These values are markedly superior to those of sintered KNN ceramic counterparts.