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New GaAs quantum wires on {111}B facets by selective MOCVD
88
Citations
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References
1989
Year
SemiconductorsSelective MocvdIi-vi SemiconductorSemiconductor DeviceEngineeringMocvd Growth ConditionsPhysicsSemiconductor TechnologyApplied PhysicsQuantum MaterialsSelective Area GrowthMolecular Beam EpitaxyMicroelectronicsOptoelectronicsCompound SemiconductorGaas ThicknessSemiconductor Nanostructures
New GaAs quantum wires are fabricated on {111}B crystallographic facets by selective area growth using metalorganic chemical vapour deposition (MOCVD). Facet formation is simply controlled by MOCVD growth conditions. The existence of 2DEG on {111}B facets is confirmed by Shubnikovde Haas oscillations. These techniques can control channel widths as narrow as 10 nm by adjusting the GaAs thickness.
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