A GaAs vertical PIN diode production process

Abstract

A GaAs vertical PIN diodes production process which integrates TaN resistors, MIM capacitors, plated airbridges, transmission lines, and via interconnects on the same MMIC chip is developed. A variety of circuit types, with high probe yields and excellent RF performance, have been fabricated. By eliminating the need for hybrid PIN diodes, this process makes significant advances in reducing the cost and complexity of radar assemblies. The monolithic microwave IC (MMIC) process flow, DC probe yields, and diode performance are reported.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>