Application of pressure swing adsorption to SF/sub 6/ separation and liquefaction from SF/sub 6//N/sub 2/ mixtures

Abstract

Discussing the various methods for SF/sub 6/ separation from SF/sub 6//N/sub 2/ mixtures, pressure swing adsorption (PSA) with a suitable kind of synthetic zeolite, which is expected molecular sieving effect derived from molecular size difference between SF/sub 6/ and N/sub 2/, has been selected. This molecular sieving effect is confirmed by the difference between two equivalent volumes filled with SF/sub 6/ and N/sub 2/. A prototype equipment of SF/sub 6/ separation and liquefaction, about 1 m cube in size and 150 kg in weight, has been assembled and tested. The ability of gas mixture handling is 13 litters/minute in average and the SF/sub 6/ gas content is reduced to 0.06% in separated N/sub 2/ which is to be exhausted in the atmosphere.