PECVD of hydrogenated silicon thin films from SiH4+H2+Si2H6 mixtures - Concepedia

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PECVD of hydrogenated silicon thin films from SiH4+H2+Si2H6 mixtures

10

Citations

3

References

2004

Year

A. Hammad, E. Amanatides, D. Mataras, D. Rapakoulias

Thin Solid Films

EngineeringSurface ScienceApplied PhysicsSih4+h2+si2h6 MixturesThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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