Ultra-low-loss Single-mode Si3N4 Waveguides with 0.7 dB/m Propagation Loss

Abstract

We report an approach to make ultra-low-loss waveguides using fixed-index-contrast stoichiometric Si3N4. A record low single-mode propagation loss of 0.70 ± 0.02 dB/m was achieved while multi-mode designs have fundamental mode loss as low as 0.43 ± 0.04 dB/m.