Publication | Closed Access
Free-space MEMS tunable optical filter on [110] silicon
13
Citations
7
References
2006
Year
Unknown Venue
PhotonicsEngineeringDeep Reactive IonOptical PropertiesApplied PhysicsOptical SwitchingIntegrated CircuitsPhotonic Integrated CircuitTunable Optical FiltersMicro-optical ComponentMicroelectronicsMicro-electromechanical SystemOptoelectronicsKey ComponentsElectro-optics DeviceOptical Logic Gate
Tunable optical filters (TOFs) are key components in optical communication WDM networks. In this paper we have successfully demonstrated two-Bragg mirror Fabry-Perot MEMS tunable optical filter fabrication by a combination of KOH and deep reactive ion etching in (110) silicon
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