The gas-analytical multisensor chip based on monolithic catalyst elements

Abstract

The implementation and experimental approbation of gas-analytical multisensor chip based on thermocatalytic effect has been considered. The chip is equipped with a polycrystalline Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> layer functionalized by PdCl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> PtCl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">6</sub> solutions and segmented by coplanar electrodes which divide it into four thermocatalytic sensor elements. The developed chip is found to be sensitive to vapors of acetone and isopropanol in a mixture with air (concentration: 350000 ppm for acetone, 70000 ppm for isopropanol). A vector signal of the array consisted of these four catalytic combustion-type sensor elements located at the chip shows a possibility to selectively recognize the test gas mixtures by processing via a linear-discriminant analysis.