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High (1 1 1) orientation poly-Ge film fabricated by Al induced crystallization without the introduction of AlO x interlayer

Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringSurface ScienceApplied PhysicsAl Induced CrystallizationAlo X InterlayerChemical DepositionOrientation Poly-ge FilmChemical Vapor DepositionThin Film Processing