SIMNRA user's guide

Abstract

This report describes the use of the program SIMNRA and the physical concepts implemented therein. SIMNRA is a Microsoft Windows 95 / Windows NT program for the simulation of back- or forward scattering spectra for ion beam analysis with MeV ions. SIMNRA is mainly intended for the simulation of spectra with non-Rutherford backscattering cross-sections, nuclear reactions and elastic recoil detection analysis (ERDA). About 300 different non-Rutherford and nuclear reaction cross-sections for incident protons, deuterons, "3He and "4He-ions are included. SIMNRA can calculate spectra for any ion-target combination including incident heavy ions and any geometry including arbitrary foils in front of the detector. SIMNRA uses the Andersen-Ziegler values for the stopping powers of swift and heavy ions and Chu energy loss straggling. Additionally SIMNRA can calculate the effects of dual scattering. Data fitting (layer thicknesses, compositions etc.) is possible by means of the Simplex algorithm. (orig.)