Concepedia

Publication | Closed Access

Energy filter for tailoring depth profiles in semiconductor doping application

DOI

11

Citations

7

References

2015

Year

Constantin Csato, Florian Krippendorf, Shavkat Akhmadaliev, J. von Borany, Weiqi Han, Thomas Siefke, André Zowalla, Michael Rüb
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1