Fluorine-free sol-gel process is a potential technique in preparing YBa ₂ Cu ₃ O _7-δ (YBCO) films due to avoiding the release of HF gas. In this paper, yttrium acetate, barium acetate, and copper acetate are used as the starting materials to synthesize a novel YBCO fluorine-free precursor solution. The phase evolution during the heat-treatment process of YBCO films and YBCO phase formation were studied, and the results show that the introduction of water vapor at the stage of high-temperature heat treatment can make the BaCO ₃ phase become converted into the Ba(OH) ₂ phase, which can be used as the barium source to react with CuO and Y ₂ O ₃ to generate the YBCO phase, thus achieving the purpose for fabrication of high-performance YBCO films by fluorine-free sol-gel process. Through this approach, YBCO films with c-axis orientation and an excellent superconducting property can be obtained on a (001)-oriented LaAlO ₃ (LAO) substrate. Superconducting property tests indicate that the superconducting critical transition temperature T _c is approximately 90 K, and the transition width T deduced from the R-T curve is less than 1 K; the critical current density J _c is 1.65 MA/cm ² (77 K, 0 T), as tested by an electric transport method, and 1.83 MA/cm ² (77 K, 0 T), as measured by magnetization measurement.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	58
2	Applied Physics	3	3	58
3	Natural Sciences	2	2	38
4	Chemistry	1	1	20
5	Materials Engineering	1	1	20

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