Concepedia
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Publications
1
Citations
37
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Active since
2003
S. G÷tze is an author specializing in natural sciences, laser optics, and extreme ultraviolet lithography.
Publications per year
2003–2003
High-power EUV lithography sources based on gas discharges and laser-produced plasmas
Uwe Stamm, Imtiaz Ahmad, István Balogh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 37 citations
Natural Sciences, Materials Science, Physics +14
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