Concepedia

Author

Takehiko Orii

Tokyo Electron (Japan)

Also Known As

Takehiko Orii

6

Publications

51

Citations

3

H-Index

13

Concepts

All Affiliations

Tokyo Electron (Japan)
TO

About

Takehiko Orii is an author at Tokyo Electron (Japan) specializing in microfabrication, surface science, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

35

2

Applied Physics

1

1

13

3

Materials Science

1

1

13

4

Mechanical Engineering

1

1

13

5

Interfacial Phenomena

1

1

13

Takehiko Orii

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3

Publications

48

Citations

3

H-Index

YearCitations

Page 1