Concepedia

Uwe Hockele

UH

2

Publications

87

Citations

2

H-Index

2011

Active since

Affiliations

Universitat Pompeu Fabra(Current)

Infineon Technologies (Germany)

Uwe Hockele is an author at Universitat Pompeu Fabra specializing in materials engineering, modeling and simulation, and industrial engineering.

Top concepts

CalibrationEngineeringApplied PhysicsSystems EngineeringComputer EngineeringElectronic PackagingPredictive AnalyticsMaterials EngineeringElectrical EngineeringIndustrial Engineering

Publications per year

2011–2013

2

Publications

2

Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition

H.‐G. Purwins, Bernd Barak, Ahmed Nagi et al. · IEEE/ASME Transactions on Mechatronics · 2013 · 69 citations · Full text

Regression methods for prediction of PECVD Silicon Nitride layer thickness

H.‐G. Purwins, Ahmed Nagi, Bernd Barak et al. · 2011 · 18 citations

Materials Engineering, Electrical Engineering, Engineering +15

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