Concepedia

Fabrizio D'Angelo

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Publications

1

Citations

18

H-Index

1

Active since

2007

Affiliations

STMicroelectronics (Italy)(Current)

Fabrizio D'Angelo is an author at STMicroelectronics (Italy) specializing in digital lithography, overlay control, and flash memory devices.

Publications per year

2007–2007

1

Publications

1

Sub-k1 = 0.25 lithography with double patterning technique for 45-nm technology node flash memory devices at λ = 193nm

Gianfranco Capetti, Pietro Cantù, Elisa Galassini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

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