X. Chen

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Active since

2013

Affiliations

Chengdu Fine Optical Engineering Research Center(Current)

X. Chen is an author at Chengdu Fine Optical Engineering Research Center specializing in optical metrology, materials engineering, and materials science.

Publications per year

2013–2015

Publications

Mid-Spatial Frequency Error (PSD-2) of optics induced during CCOS and full-aperture polishing

Defeng Liao, Zhijun Yuan, C. C. Tang et al. · Journal of the European Optical Society Rapid Publications · 2013 · 26 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Deterministic measurement and correction of the pad shape in full-aperture polishing processes

Defeng Liao, Q. Zhang, Ruiqing Xie et al. · Journal of the European Optical Society Rapid Publications · 2015 · 12 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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