Statistics
Publications
1
Citations
13
H-Index
1
Active since
2024
Affiliations
Shuichi Kuboi is an author at Kanagawa Industrial Technology Center specializing in etching processes, microfabrication, and profile control.
Publications per year
2024–2024
1
1
Chihiro Abe, Toshiyuki Sasaki, Yukishige Kondo et al. · Japanese Journal of Applied Physics · 2024 · 13 citations · Full text
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