Statistics
Publications
1
Citations
20
H-Index
1
Active since
2023
Jayson Stewart is an author specializing in plasma sources, materials science, and extreme ultraviolet lithography.
Publications per year
2023–2023
1
1
EUV light source for high-NA and low-NA lithography
K. R. Umstadter, Matt W. Graham, Michael Purvis et al. · 2023 · 20 citations
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