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Publications
1
Citations
10
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Active since
2014
W S Kim is an author specializing in etching processes, plasma-surface interactions, and surface engineering.
Publications per year
2014–2014
A study on reactive ion etching lag of a high aspect ratio contact hole in a magnetized inductively coupled plasma
Hee‐Woon Cheong, Woobeen Lee, J W Kim et al. · Plasma Sources Science and Technology · 2014 · 10 citations
Engineering, Materials Engineering, Materials Science +15
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