Concepedia

Keith A. Benton

KA

Statistics

Publications

1

Citations

19

H-Index

1

Active since

1996

Keith A. Benton is an author specializing in doping in nanostructures, lateral dopant distribution, and semiconductor device materials.

Publications per year

1996–1996

1

Publications

1

Resistless, area-selective ultrashallow <i>P</i>+/<i>N</i> junction fabrication using projection gas immersion laser doping

K.-Josef Kramer, S. Talwar, Isabella T. Lewis et al. · Applied Physics Letters · 1996 · 19 citations

Engineering, Materials Engineering, Materials Science +17

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