Concepedia
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Publications
1
Citations
14
H-Index
Active since
1986
M. Tobasky is an author specializing in plasma etching, materials engineering, and surface science.
Publications per year
1986–1986
Selective Dry Etching of Tungsten for VLSI Metallization
M. E. Burba, E. O. Degenkolb, Steven A. Henck et al. · Journal of The Electrochemical Society · 1986 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
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